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Threading Dislocation Suppression for Sub-10 nm Fin-FET via Hydrogen Implantation and Subsequent Annealing

  • 박재근
제목
Threading Dislocation Suppression for Sub-10 nm Fin-FET via Hydrogen Implantation and Subsequent Annealing
저자
박재근
발행일
2015-11-13
학회명
3rd Symposium for International Advanced Functional Materials & Devices
개최지
SUMCO Kyushu Factory (Imari)

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