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Si3N4 Film Passivation by PAA adlayer in STI CMP : Role of PAA Conformation

  • 박재근
제목
Si3N4 Film Passivation by PAA adlayer in STI CMP : Role of PAA Conformation
저자
박재근
발행일
2009-04-15
학회명
2009 MRS Spring Meeting
개최지
San Fransisco, CA

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