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Study of Si-based Small Molecular Inhibitor with various functional groups for Area-Selective Atomic Layer Deposition of Molybdenum Oxide
- 제목
- Study of Si-based Small Molecular Inhibitor with various functional groups for Area-Selective Atomic Layer Deposition of Molybdenum Oxide
- 저자
- 박진성
- 발행일
- 2023-04-03
- 학회명
- ASD Workshop 2023
- 개최지
- 인천, 대한민국