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Nitrogen Doping via PEALD to Suppress Crystallization of In-rich IGO for High-Performance TFTs

제목
Nitrogen Doping via PEALD to Suppress Crystallization of In-rich IGO for High-Performance TFTs
저자
박진성
발행일
2025-12-11
학회명
ICAMD2025
개최지
부산 벡스코

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