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Elimination of Threading Dislocation via Hydrogen Ion Implantation for Graded SiGe Layer

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Elimination of Threading Dislocation via Hydrogen Ion Implantation for Graded SiGe Layer
저자
박재근
발행일
2006-04-21
학회명
한국물리학회
개최지
평창 휘닉스파크

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