상세 보기
Applying XAI to Fault Detection and Classification for Semiconductor Manufacturing Processes
- Lee, Jongsoo;
- Park, Byeongtae;
- Chae, Dong Kyu
- 제목
- Applying XAI to Fault Detection and Classification for Semiconductor Manufacturing Processes
- 저자
- Lee, Jongsoo; Park, Byeongtae; Chae, Dong Kyu
- 발행일
- 2022-11
- 유형
- Proceeding
- 저널명
- Korean International Semiconductor Conference on Manufacturing Technology (KISM) 2022
- 페이지
- 352 ~ 352