On-Chip Nanopore Fabrication using Self-Aligned Multilayer Electron Beam Resist Sacrificial Templates

제목
On-Chip Nanopore Fabrication using Self-Aligned Multilayer Electron Beam Resist Sacrificial Templates
저자
이승백
발행일
2013-07-11
학회명
Nano Korea Symposium 2013
개최지
COEX, Korea