MTJ 버퍼층의 Ta/Ru 층의 두께 및 공정 온도 조건에 따른 Roughness에 대한 연구

초록

The roughness of MTJ has an effect on TMR and RA. We measured Ra, P-V, and RMS by using AFM, with varying the thickness of Ta and Ru in the Buffer Layer and process temperature condition so as to find a little better roughness condition. Furthermore, we present a direction for finding even better roughness condition.