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Effect of Poly (Diallyl Dimethyl Ammonium Chloride) Concentration in 25-nm Crystal Zirconium Dioxide Abrasive on Tungsten CMP Performance for 3D NAND

  • 박재근
제목
Effect of Poly (Diallyl Dimethyl Ammonium Chloride) Concentration in 25-nm Crystal Zirconium Dioxide Abrasive on Tungsten CMP Performance for 3D NAND
저자
박재근
발행일
2017-11-06
학회명
IUMRS-ICA 2017
개최지
Taipei Nangang Exhibition Hall

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