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Influence of Bead Size during Ceria Abrasive Milling Process on High Selectivity and Light Point Defect (LPD) Formation after STI-CMP
- 제목
- Influence of Bead Size during Ceria Abrasive Milling Process on High Selectivity and Light Point Defect (LPD) Formation after STI-CMP
- 저자
- 백운규
- 발행일
- 2006-05-19
- 학회명
- 2006년 춘계 한국재료학회
- 개최지
- 경상대학교