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초록
First, one dimensional arc plasma model is presented as analytical model that being taken into account of physical phenomenon at cathode spot area and sheath behavior. Based on one dimensional arc plasma model, simplified 2 dimensional model of arc plasma is explained as radial distance of plasma that contains geometrical sheath formation at cathode area.
키워드
Cavity resonators; Discharge (fluid mechanics); Electric discharges; Electric reactors; Fluid mechanics; Plasmas; Vacuum; (2+1)-dimensional; Accurate modeling; Analytical modelling; Arc plasmas; Cathode area; cathode spots; Cylindrical reactors; Dimensional model; Electrical insulation; In-vacuum; International symposium; Low pressure (LP); Physical phenomenon; radial distances; Plasma enhanced chemical vapor deposition
- 제목
- Simple and accurate modeling of transient discharging phase at low pressure in cylindrical reactor
- 저자
- Kim, Bong Seong; Ko, Kwang Cheol
- 발행일
- 2006-09
- 유형
- Conference Paper
- 저널명
- Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
- 권
- 1
- 페이지
- 87 ~ 90