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Effect of Nano-Wet Ceria Abrasive-Size on Planarization of Nano-Scale Surface Poly-Si Roughness for Poly-Si CMP

  • 박재근
제목
Effect of Nano-Wet Ceria Abrasive-Size on Planarization of Nano-Scale Surface Poly-Si Roughness for Poly-Si CMP
저자
박재근
발행일
2016-10-18
학회명
ICPT 2016
개최지
Beijing Friendship Hotel

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