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Effect of Slurry Characteristics on Nanotopography Impact in Chemical Mechanical Polishing and Its Numerical Simulation

  • 박재근
제목
Effect of Slurry Characteristics on Nanotopography Impact in Chemical Mechanical Polishing and Its Numerical Simulation
저자
박재근
발행일
2003-11-21
학회명
2003 한국재료학회 추계학술발표대회
개최지
연세대학교

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