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Remote Plasma Chemical Vapor Deposition of SiOC Thin Film with Styrene-contained Precursor and In-situ O2 Plasma Treatment

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Remote Plasma Chemical Vapor Deposition of SiOC Thin Film with Styrene-contained Precursor and In-situ O2 Plasma Treatment
저자
전형탁
발행일
2023-11-22
학회명
KISM 2023
개최지
파라다이스 호텔 부산

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