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초록
This paper proposes an advanced signal processing technique for the precise estimation of a nonlinear ultrasonic parameter, based on power spectral and bispectral analysis. The power spectrum and bispectrum estimation of the pulse-like ultrasonic signal used in the commercial SAM (scanning acoustic microscopy) equipment is especially considered in this study. The usefulness of the proposed estimation is confirmed by experiments for a Newton ring with a continuous air gap and a real semiconductor sample with local delaminations. The results show that the nonlinear parameter obtained by the proposed method had a good correlation with the delamination.
키워드
Bispectrum; Nonlinear parameter; Periodogram; Power spectrum; Signal processing; Ultrasonic nonlinearity; Microscopic examination; Semiconductor materials; Signal processing; Spectrum analysis; Ultrasonic applications; Bispectrum; Nonlinear parameters; Periodograms; Power spectra; Scanning acoustic microscopy (SAM); Ultrasonic nonlinearity; Parameter estimation
- 제목
- Advanced technologies for estimation of nonlinear ultrasonic parameter
- 저자
- Jhang, Kyung Young; Sasaki, Kimio; Ha, Job; Tanaka, Hiroaki
- 발행일
- 2006-12
- 유형
- Conference Paper
- 권
- 326-328 I
- 페이지
- 673 ~ 676