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Comparison of H2O2 and KMnO4 as Oxidizer in Ge2Sb2Te5 Chemical Mechanical Polishing

제목
Comparison of H2O2 and KMnO4 as Oxidizer in Ge2Sb2Te5 Chemical Mechanical Polishing
저자
백운규
발행일
2010-04-06
학회명
2010 MRS SPRING MEETING
개최지
San Francisco

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