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Electrostatically Modified Ceria Particles for Restraining of Remaining Particle and Scratch in STI CMP Process
- 제목
- Electrostatically Modified Ceria Particles for Restraining of Remaining Particle and Scratch in STI CMP Process
- 저자
- 백운규
- 발행일
- 2009-09-07
- 학회명
- ICCCI 2009
- 개최지
- Kurashiki, Japan