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Characteristics of Hafnium Nitridefilms deposited by Remote Plasma enhanced Atomic Layer Deposition method

  • 전형탁
제목
Characteristics of Hafnium Nitridefilms deposited by Remote Plasma enhanced Atomic Layer Deposition method
저자
전형탁
발행일
2006-07-25
학회명
AVS International Conference on Atomic Layer Deposition
개최지
서울교육문화회관

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