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Effective Condensation Process for Higher Ge Concentration and Thin SiGe layer-on-insulator Substrates in Advanced High Mobility MOSFETs

  • 박재근
제목
Effective Condensation Process for Higher Ge Concentration and Thin SiGe layer-on-insulator Substrates in Advanced High Mobility MOSFETs
저자
박재근
발행일
2012-10-09
학회명
222nd ECS Meeting
개최지
Hawaii Convention Center and the Hilton Hawaiian Village

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