Simulation benchmarks of the XPDP1 PIC-MCC code on capacitively coupled plasma helium discharges

제목
Simulation benchmarks of the XPDP1 PIC-MCC code on capacitively coupled plasma helium discharges
저자
Ming-Chieh Lin
발행일
2022-10-06
학회명
75th Annual Gaseous Electronics Conference
개최지
Sendai, Japan