Characteristics of a-C/B:H films from non-toxic o-carborane vapor prepared by using DC glow discharges

초록

A non-toxic boron-containing material, carborane (C2B10H12), has been utilized to deposit amorphous hydrogenated carbon/boron (a-C/B:H) thin films in helium DC glow discharges. The helium plasma was produced at a target pressure of similar to 5 mTorr in the pulsed mode at a duty cycle of 0.375 (3 s on/5 s off) or 0.23 (3 s on/10 s off) by using a filament discharge system connected with a carborane evaporation source. Deposited a-C/B:H thin films were characterized by using variable angle spectroscopic ellipsometry, scanning electron microscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy. The a-C/B:H thin films have soft polymer-like characteristics with optical constants of n = 1.65 and k = 10(-3) at 632 nm, and the B/C ratio inside the bulk was similar to 2 for an similar to 60% boron contents. The evaporation characteristics of carborane powder under vacuum were also investigated.

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