Dependence of Copper Gettering on Crystalline Nature in As-grown CZ Silicon Wafer

  • 박재근
제목
Dependence of Copper Gettering on Crystalline Nature in As-grown CZ Silicon Wafer
저자
박재근
발행일
2012-05-08
학회명
221st ECS Meeting
개최지
Washington State Convention Center, Seattle, USA