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Effect of physicochemical characteristics of nano ceria slurry on shallow trench isolation cmp
- 제목
- Effect of physicochemical characteristics of nano ceria slurry on shallow trench isolation cmp
- 저자
- 백운규
- 발행일
- 2005-03-31
- 학회명
- 2005 MRS SPRING MEETING
- 개최지
- San Francisco