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The influence of physicochemical property of ceria particles on oxide removal rate on Chemical Mechanical Planarization for Shallow Trench Isolation

  • 박재근
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The influence of physicochemical property of ceria particles on oxide removal rate on Chemical Mechanical Planarization for Shallow Trench Isolation
저자
박재근
발행일
2002-05-24
학회명
한국결정성장학회
개최지
한양대학교

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