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Investigation of the effect of plasma treatments in various ambients on the electrical properties of MIS structure by RPALD

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Investigation of the effect of plasma treatments in various ambients on the electrical properties of MIS structure by RPALD
저자
전형탁
발행일
2010-08-23
학회명
IUMRS-ICEM 2010
개최지
KINTEX , GyeongGi-Do, Korea

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