ScholarWorks@한양대학교

상세 보기

Radio Frequency Plasma Power Dependence on the Moisture Permeation Barrier Characteristics of Al2O3 Films Deposited by Remote Plasma Atomic Layer Deposition

  • 전형탁
제목
Radio Frequency Plasma Power Dependence on the Moisture Permeation Barrier Characteristics of Al2O3 Films Deposited by Remote Plasma Atomic Layer Deposition
저자
전형탁
발행일
2013-07-30
학회명
ALD 2013
개최지
san diego, California

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.