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Highly dispersed Fe-substituted colloidal silica nanoparticles in acidic pH region for tungsten chemical mechanical planarization
- 제목
- Highly dispersed Fe-substituted colloidal silica nanoparticles in acidic pH region for tungsten chemical mechanical planarization
- 저자
- 송태섭
- 발행일
- 2022-11-14
- 학회명
- KISM 2022
- 개최지
- 부산 파라다이스 호텔