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Effects of pH, Molecular Weight and concentration of surfactant in Nano-Ceria STI-CMP

  • 박재근
제목
Effects of pH, Molecular Weight and concentration of surfactant in Nano-Ceria STI-CMP
저자
박재근
발행일
2005-05-27
학회명
한국재료학회 춘계학술발표대회
개최지
무주리조트 티롤호텔

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