ScholarWorks@한양대학교

상세 보기

A Compact Hollow-Anode Discharge Source for Sputtering Processes

  • 정규선
제목
A Compact Hollow-Anode Discharge Source for Sputtering Processes
저자
정규선
발행일
2016-09-28
학회명
The 6th International Conference on Microelectronics and Plasma Technology
개최지
Dream Center, Gyeongju, in Korea

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.