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Physical and Electrical Chracteristics of ZrxHf1-xOy Films Deposited by Atomic Layer Deposition Method

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Physical and Electrical Chracteristics of ZrxHf1-xOy Films Deposited by Atomic Layer Deposition Method
저자
전형탁
발행일
2007-10-15
학회명
AVS 54th International Symposium & Exhibition
개최지
Seattle, Washington

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