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Selective Si1-xGex-Film Wet Etchant via Peracetic Acid Oxidant for Lateral Gate-All-Around FETs Less Than 3-nm Logic Node

  • 박재근
제목
Selective Si1-xGex-Film Wet Etchant via Peracetic Acid Oxidant for Lateral Gate-All-Around FETs Less Than 3-nm Logic Node
저자
박재근
발행일
2022-11-14
학회명
Korean international semiconductor conference on manufactureing technology 2022
개최지
부산

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