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Plasma enhanced atomic layer deposition SiO2 deposited at low temperature for thin film encapsulation
- 제목
- Plasma enhanced atomic layer deposition SiO2 deposited at low temperature for thin film encapsulation
- 저자
- 박진성
- 발행일
- 2016-08-26
- 학회명
- The 16th international meeting on information display
- 개최지
- ICC jeju