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Comparison of H2O2 and KMnO4 as Oxidizer in Ge2Sb2Te5 Chemical Mechanical Polishing

  • 박재근
제목
Comparison of H2O2 and KMnO4 as Oxidizer in Ge2Sb2Te5 Chemical Mechanical Polishing
저자
박재근
발행일
2010-04-06
학회명
2010 MRS Spring Meeting
개최지
USA/San Francisco

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