Paddle-type MEMS sensors for size dependent particle detection using electrostatic triggering

제목
Paddle-type MEMS sensors for size dependent particle detection using electrostatic triggering
저자
이승백
발행일
2010-08-20
학회명
IEEE NANO 2010 10th IEEE International Conference on Nanotechnology Joint Symposium with NANO KOREA
개최지
KINTEX KOREA