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Effect of Abrasive Size and Concentration on the Non-Prestonian Behavior of Ceria Slurry with Surfactant for STI-CMP

  • 박재근
제목
Effect of Abrasive Size and Concentration on the Non-Prestonian Behavior of Ceria Slurry with Surfactant for STI-CMP
저자
박재근
발행일
2004-10-23
학회명
2004 Fall meeting of Korean Physical Society
개최지
Jeju University, Jeju, Korea

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