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Properties of Si-based Nanostuructures Fabricated by PECVD and UHV Sputtering Methods

  • 김은규
제목
Properties of Si-based Nanostuructures Fabricated by PECVD and UHV Sputtering Methods
저자
김은규
발행일
2003-09-24
학회명
10th Korea-China Symposium on Thin Film Materials
개최지
Seoul

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