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Design and Simulation of a Microwave Plasma Enhanced Chemical Vapor Deposition System Using Multiphysics Fluid Modeling
- 제목
- Design and Simulation of a Microwave Plasma Enhanced Chemical Vapor Deposition System Using Multiphysics Fluid Modeling
- 저자
- Ming-Chieh Lin
- 발행일
- 2023-05-23
- 학회명
- The 50th IEEE International Conference on Plasma Science (ICOPS)
- 개최지
- Santa Fe, New Mexico, USA