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Polishing Condition Dependency of Nanotopography Impacts on Oxide Chemical Mechanical Polishing
- 제목
- Polishing Condition Dependency of Nanotopography Impacts on Oxide Chemical Mechanical Polishing
- 저자
- 백운규
- 발행일
- 2002-08-21
- 학회명
- The 11th Seoul International Symposium on the Physics of Semiconductors and applications-2002
- 개최지
- 제주 그랜드 호텔