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Adhesion Behavior of RuO2 Thin Film Sputter Deposited Using Ru and RuO2 Target

  • 김영호
제목
Adhesion Behavior of RuO2 Thin Film Sputter Deposited Using Ru and RuO2 Target
저자
김영호
발행일
1997-08-01
학회명
The 9th Inter.Meeting on Ferroelectricity

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