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Active control of D/H ratio in a-C/B:H(D) thin film deposition using D2 glow discharge for KSTAR

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Active control of D/H ratio in a-C/B:H(D) thin film deposition using D2 glow discharge for KSTAR
저자
정규선
발행일
2011-02-23
학회명
2011 KSTAR Conference and KO-US Workshop
개최지
대한민국

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