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Comparison of grain growth of poly-Si films deposited with PECVD, LPCVD and sputtering for 3D DRAM application
- 제목
- Comparison of grain growth of poly-Si films deposited with PECVD, LPCVD and sputtering for 3D DRAM application
- 저자
- 안진호
- 발행일
- 2023-11-20
- 학회명
- PRICM11
- 개최지
- 제주 국제 컨벤션센터