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Effect of Slurry pH and H2O2 on Crystalline Ge2Sb2Te5 CMP Performance for PRAM Device

제목
Effect of Slurry pH and H2O2 on Crystalline Ge2Sb2Te5 CMP Performance for PRAM Device
저자
백운규
발행일
2010-04-06
학회명
2010 MRS SPRING MEETING
개최지
San Francisco

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