In-situ Monitoring System Equipped with FT-IR and QMS and Decomposition of Zr(NCH3C2H5)4 Precursor

제목
In-situ Monitoring System Equipped with FT-IR and QMS and Decomposition of Zr(NCH3C2H5)4 Precursor
저자
안진호
발행일
2016-10-05
학회명
Pacific Rim Meeting on Electrochemical and Solid-state Science 2016
개최지
미국 Honolulu