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Development of High-Performance In2O3 -TFTs using Atmospheric Pressure Spatial ALD toward High Throughput in Flexible Device Industry
- 제목
- Development of High-Performance In2O3 -TFTs using Atmospheric Pressure Spatial ALD toward High Throughput in Flexible Device Industry
- 저자
- 박진성
- 발행일
- 2024-01-26
- 학회명
- KCS 2024
- 개최지
- 경주화백컨벤션센터