Experimental analysis on the 0 dimensional plasma model in an inductively coupled plasma (ICP)

초록

A 0 dimensional model is widely used because of its simple and easy application to lowtemperature plasmas, and the model can be applied and tested in a cylindrical inductivelycoupled plasma (ICP). The electron energy distribution functions (EEDFs) obtained by using rf-compensated Langmuir probes under various conditions (pressures and rf powers) are measured for comparison with those obtained using the model, and the plasma densities and the electron temperatures from the EEDF are compared with those from the model. The measured plasma densities are found to be almost 50% of those from the model, and the measured electron temperatures are 150% larger than those from the model. If these discrepancies are to be reduced, the effects of a non-Maxwellian electron energy distribution, the plasma generation efficiency, and the gas temperature on the model need to be considered in a modified model. When such effects are considered in a modified model, the experimental results are found to agree well with the results obtained from the modified model. This shows that such effects must be considered in the model.

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