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Adhesion Evaluation in Pt/Ti BilayerFilms for a Bottom Electrode of Ferro-electric Materials

  • 김영호
제목
Adhesion Evaluation in Pt/Ti BilayerFilms for a Bottom Electrode of Ferro-electric Materials
저자
김영호
발행일
1996-11-01
학회명
Proceeding of C-MRS and MRS-KJoint Symposium

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