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Design of a Microwave Plasma Enhanced Chemical Vapor Deposition System Using the Fluid Modeling based on the Finite Element Method
- 제목
- Design of a Microwave Plasma Enhanced Chemical Vapor Deposition System Using the Fluid Modeling based on the Finite Element Method
- 저자
- Ming-Chieh Lin
- 발행일
- 2022-10-04
- 학회명
- 75th Annual Gaseous Electronics Conference
- 개최지
- Sendai, Japan