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Physical property and Environmental degradation of plasma enhance atomic layer deposited SiNx thin film on low temperature process
- 제목
- Physical property and Environmental degradation of plasma enhance atomic layer deposited SiNx thin film on low temperature process
- 저자
- 박진성
- 발행일
- 2017-08-31
- 학회명
- IMID 2017
- 개최지
- 부산 해운대, BEXCO