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Investigation for reaction mechanism on ALD and CVD of Cobalt from dicobalt hexacarbonyl tert-butylacetylene

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Investigation for reaction mechanism on ALD and CVD of Cobalt from dicobalt hexacarbonyl tert-butylacetylene
저자
전형탁
발행일
2012-08-16
학회명
2012 Nano Korea
개최지
코엑스

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