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Research for Threading Dislocation Reduction in SiGe Layer by Hydrogen Ion Implantation

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Research for Threading Dislocation Reduction in SiGe Layer by Hydrogen Ion Implantation
저자
박재근
발행일
2015-05-08
학회명
2nd Symposium for International Advanced Functional Materials & Devices
개최지
노보텔 엠베서더 부산

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